Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
نویسندگان
چکیده
منابع مشابه
Experimental Verification of Squeezed - Film Damping Models for Mems
⎯ A technique for dynamic positioning of the movable electrode in an electrostatic actuator enables stable operation beyond the pull-in displacement and is used to perform squeeze-film damping measurements for different film thicknesses. Measurements at Knudsen numbers ranging between 0.03 and 0.18 are performed. Compact parallel-plate squeeze-film models are verified using the experimental res...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2009
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/19/7/074021